Growth of ITO thin films by magnetron sputtering: OES study, opticaland electrical properties
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference17 articles.
1. Influence of substrate temperature on the properties of laser ablated indium tin oxide films
2. Deposition by magnetron sputtering and characterization of indium tin oxide thin films
3. Polycrystalline;Guillén;Thin Solid Films,2006
4. Influence of oxygen in the deposition and annealing atmosphere on the characteristics of ITO thin films prepared by sputtering at room temperature
5. The evolution of the structural, electrical and optical properties in indium-tin-oxide thin film on glass substrate by DC reactive magnetron sputtering
Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Ion behavior impact on ITO thin film fabrication via DC magnetron sputtering with external anode;Vacuum;2024-03
2. Investigation of Low Temperature Amorphous (in X Ga1- X )2o3 Films Modulated by Indium Content for Optimization in Solar-Blind Photodetector;2024
3. Investigation of Amorphous (in X Ga1- X )2o3 Alloy Films Modulated by Indium Content for Optimization in Solar-Blind Photodetector;2024
4. Texture evolution mechanism of pulsed laser deposited in-doped Ga2O3 film affected by laser fluence and its application in solar-blind photodetector;Vacuum;2022-11
5. Effect of power density on compositional and structural evolution of ITO thin film by HiPIMS method;Vacuum;2022-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3