Effect of energy on the formation of flexible hard Al-Si-N films prepared by magnetron sputtering
Author:
Funder
Czech Ministry of Education
Youth and Sports and Russian National Fund
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference16 articles.
1. Flexible hard nanocomposite coatings;Musil;RSC Adv.,2015
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4. Toughening of hard nanostructured thin films: a critical review;Zhang;Surf. Coat. Technol.,2005
5. Microstructure and mechanical properties of Al-Si-N transparent hard coatings deposited by magnetron sputtering;Pelisson;Surf. Coat. Technol.,2007
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