Influence of deposition pressure on the structural mechanical and decorative properties of TiN thin films deposited by cathodic arc evaporation
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference12 articles.
1. The mechanical and structural properties of Ti films prepared by filtered arc deposition
2. Indentation hardness evaluation of cathodic arc deposited thin hard coatings
3. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
4. A modified method for arc deposition of Ti-N thin films
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