Characteristics of high-power impulse magnetron sputtering (HiPIMS) deposited nanocomposite-TiAlSiN coating under variable pulse frequencies
Author:
Funder
Department of Science and Technology
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference68 articles.
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3. Improved oxidation resistance of TiAlN coatings by doping with Si or B;Pfeiler;Surf. Coating. Technol.,2009
4. Selection of metal ion irradiation for controlling Ti1−xAlxN alloy growth via hybrid HIPIMS/magnetron co-sputtering;Greczynski;Vacuum,2012
5. Microstructure and mechanical properties of nanocomposite (Ti,Si,Al)N coatings;Carvalho;Thin Solid Films,2001
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Influence of synchronized pulse bias on the Microstructure and Properties of CrSiN nano-composite ceramic films deposited by MIS-HiPIMS;Ceramics International;2024-09
2. Investigations on the Structure, Mechanical Property, Wear and Oxidation Resistances of TiAlSiN Coatings by Tailoring Al/(Al + Ti) Ratios;Advanced Engineering Materials;2024-07-30
3. Study on the sand erosion resistance of ZrN and ZrAlSiN coatings;Surface and Coatings Technology;2024-07
4. Effect of Si contents on microstructure and mechanical characteristics of TiAlSiN thin film deposited by HiPIMS using different Ti Si target compositions;Surface and Coatings Technology;2024-01
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