Author:
Lisovskiy V.,Booth J.-P.,Landry K.,Douai D.,Cassagne V.,Yegorenkov V.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference55 articles.
1. Semiconductor lithography. Principles, practices, and materials;Moreau,1988
2. Handbook of advanced plasma processing techniques,2000
3. Gas Discharge Cleaning of Vacuum Surfaces
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