Investigation on morphology and evolution process of plasma induced pitting damage during the ICP etching of fused silica-Reference-Cited by-同舟云学术

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Investigation on morphology and evolution process of plasma induced pitting damage during the ICP etching of fused silica

Published:2016-01 Issue: Volume:123 Page:121-125
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Jiang Xiaolong,Liu Ying,Muhutijiang Bilali,Liu Zhengkun,Qiu Keqiang,Xu Xiangdong,Hong Yilin,Fu Shaojun

Funder

Chinese Academy of Sciences

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference17 articles.

1. NIF optical materials and fabrication technologies: an overview;Campbell;Proc. SPIE,2004

2. Combined advanced finishing and UV-laser conditioning for producing UV-damage-resistant fused silica optics;Menapace;Proc. SPIE,2002

3. Optimized condition for etching fused-silica phase gratings with inductively coupled plasma technology;Wang;Appl. Opt.,2005

4. High-speed Ultrasmooth Etching of Fused Silica Substrates in SF6, NF3, and H2O-Based Inductively Coupled Plasma Process.;Zhang;J. Microelectromech. Syst.,2015

5. The morphology and chemistry evolution of fused silica surface after Ar/CF4 atmospheric pressure plasma processing;Jin;Appl. Surf. Sci.,2013

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Evaluation of plasma parameters’ impact on MRR and surface roughness in plasma polishing of fused silica: An investigation of surface characterization;Vacuum;2024-07

2. Structuring Silicon in a High-Frequency Discharge of Freon R-23;Russian Microelectronics;2022-06

3. EXPERIMENTAL STUDY OF THE MECHANISM EROSION MATERIALS EXPOSED TO LOW PLASMA POWER FLOWS;NNC RK Bulletin;2021-05-01

4. Experimental investigation of high power inductively coupled plasma etching of fused silica at atmospheric pressure;Second Target Recognition and Artificial Intelligence Summit Forum;2020-01-31

5. Damage Study of Irradiated Tungsten using fast focus mode of a 2.2 kJ plasma focus;Vacuum;2017-10

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