The morphology and chemistry evolution of fused silica surface after Ar/CF4 atmospheric pressure plasma processing-Reference-Cited by-同舟云学术

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The morphology and chemistry evolution of fused silica surface after Ar/CF4 atmospheric pressure plasma processing

Published:2013-12 Issue: Volume:286 Page:405-411
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Jin Huiliang,Xin Qiang,Li Na,Jin Jiang,Wang Bo,Yao Yingxue

Funder

National Natural Science Foundation of China

National Science and Technology Major Project

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference21 articles.

1. NIF optical materials and fabrication technologies: an overview;Campbell;Proceedings of SPIE,2004

2. Combined advanced finishing and UV-laser conditioning for producing UV-damage-resistant fused silica optics;Menapace;Proceedings of SPIE,2002

3. Sub-surface mechanical damage distributions during grinding of fused silica;Suratwala;Journal of Non-Crystalline Solids,2006

4. Mechanism of polishing of SiO2 films by CeO2 particles;Hoshino;Journal of Non-Crystalline Solids,2001

5. Reactive atom plasma (RAPTM) processing of mirrors for astronomy;Subrahmanyan;Proceedings of SPIE,2008

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1. Advances in finishing of optical complex substrates: A comprehensive review;Optics & Laser Technology;2024-09

2. Evaluation of plasma parameters’ impact on MRR and surface roughness in plasma polishing of fused silica: An investigation of surface characterization;Vacuum;2024-07

3. The Satisloh plasma polisher: plasma surface figuring ultra precision optics;Optifab 2023;2023-11-30

4. Compensation of the tool influence function changes under neighborhood effect in atmospheric pressure plasma processing;Optics Express;2023-11-06

5. Advanced Plasma Polishing Process: Principle, Recent Applications, Challenges, and Future Scope;Lecture Notes in Mechanical Engineering;2023-10-20

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