Improvement in crystallinity of ZnO and Zn2SiO4 phases by rf sputter deposition; effect of substrate bias-Reference-Cited by-同舟云学术

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Improvement in crystallinity of ZnO and Zn2SiO4 phases by rf sputter deposition; effect of substrate bias

Published:2018-11 Issue: Volume:157 Page:72-75
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Siva Kumar V.V.,Sharma M.K.

Funder

RBS

Centre for Nanoscience and Nanotechnology

Jamia Millia Islamia, New Delhi

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference12 articles.

1. Energetic oxygen ions in ZrO2 deposition by reactive sputtering of Zr

2. Unusual growth of polycrystalline oxide film induced by negative ion bombardment in the capacitively coupled plasma deposition

3. Structure control of sputtered zinc oxide films by utilizing zinc oxide seed layers tailored by ion beam assisted sputtering

4. Synthesis of nano-sized SiC precipitates in Si by simultaneous dual-beam implantation of C + and Si + ions

5. Nanocrystalline diamond films growth by microwave ECR CVD: Studies of structural and photoconduction properties

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1. Morphology induced defects and crystal facet engineering in CQD@CdS photocatalyst for efficient hydrogen generation;Applied Surface Science;2024-11

2. Investigating the simultaneous effect of bias voltage and annealing on structural and optical properties of ZnO layer prepared by RF magnetron sputtering;Results in Optics;2024-02

3. Effects of Substrate Bias Voltage and Post-Annealing on Structure and Optical Properties of Zno Layer Prepared by Rf Magnetron Sputtering;2023

4. Effect of gamma ray irradiation on structural and surface properties of c-axis oriented ZnO thin films;Radiation Physics and Chemistry;2021-12

5. Deposition and properties of ZnSiO3-containing zinc oxide thin films reactively sputtered at room temperature;Thin Solid Films;2020-09

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