Process parameter analysis and parasitic reaction of ZnO grown through MOCVD-Reference-Cited by-同舟云学术

Process parameter analysis and parasitic reaction of ZnO grown through MOCVD

Published:2018-11 Issue: Volume:157 Page:76-82
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Li Jian,Lai Yuanjia,Xu Yifeng,Chen Zimin,Pei Yanli,Wang Gang

Funder

Guangdong Province Key Fund

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference41 articles.

1. Novel design and performance of the solidly mounted resonator with an AlN-buffered ZnO piezoelectric film;Liu;Vacuum,2018

2. Improved performance of sol–gel ZnO-based perovskite solar cells via TiCl 4 interfacial modification;Ko;Sol. Energy Mater. Sol. Cells,2018

3. Graphene-like ZnO: a mini review;Ta;Crystals,2016

4. Effect of substrate temperature on the structural and electrical properties of CIGS films based on the one-stage co-evaporation process;Wang;Semicond. Sci. Technol.,2010

5. Effect of Na on lower open circuit voltage of flexible CIGS thin-film solar cells prepared by the low-temperature process;Liu;Phys. Scripta,2012

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A batch preparation of large-size graphite plate/SiC coating by CVD: CFD simulation and experimental;Ceramics International;2024-05

2. Quantitative computational study of gas - phase reaction mechanism between DEZn and t -BuOH in ZnO growth by MOCVD;2024

3. Theoretical adjustment of metalorganic chemical vapor deposition process parameters for high-quality gallium nitride epitaxial films;Physics of Fluids;2023-03-01

4. Study on stability of cavity in metal–organic chemical vapor deposition calculation based on neural network method;Physics of Fluids;2022-10

5. Nickel doping in zinc oxide by MOCVD: structural and optical properties;Quantum Sensing and Nano Electronics and Photonics XVII;2020-01-31