Alteration of internal stresses in SiO2/Cu/TiN thin films by X-ray and synchrotron radiation due to heat treatment
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference12 articles.
1. Examination of residual stress, morphology and mechanical properties of sputtered TiN films
2. Residual stress in ion-assisted coatings
3. Scuffing behavior of TiN-coated steel rollers under rolling and sliding conditions
4. The structure of TiN films deposited by arc ion plating
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3. Residual Stresses of Sputtering Titanium Thin Films at Various Substrate Temperatures;Journal of Nanoscience and Nanotechnology;2010-07-01
4. Structure, mechanical and thermodynamic stability of vacancy clusters in Cu;Modelling and Simulation in Materials Science and Engineering;2010-05-28
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