Pressure dependence of surface wave-excited plasma column sustained along metal rod antenna
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference28 articles.
1. Principles of plasma discharges and materials processing;Lieberman,1994
2. Colloquium:Reactive plasmas as a versatile nanofabrication tool
3. Guided-wave-produced plasmas;Aliev,2000
4. A Small Microwave Plasma Source for Long Column Production without Magnetic Field
5. Space Charge Waves in Cylindrical Plasma Columns
Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Development of DLC Film Coating Technology to Achieve both High Performance and High Productivity Utilizing High-Density Plasma;Journal of The Surface Finishing Society of Japan;2022-03-01
2. Design of a High-Efficiency Dual-Helical Antenna for Microwave Plasma Sources;IEEE Transactions on Plasma Science;2022-02
3. The Friction Property of a-C:H:Si Deposited by High-Speed Coating with Microwave Sheath-Voltage Combination Plasma Method;Journal of The Surface Finishing Society of Japan;2018-01-01
4. Tribological behavior of unlubricated sliding between a steel ball and Si-DLC deposited by ultra-high-speed coating employing an MVP method;Surface and Coatings Technology;2017-12
5. Fabrication of Thin Solid Coating and Tribology with Plasma and Ion Beam Process;Journal of the Japan Society for Precision Engineering;2017
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3