Fabrication of Thin Solid Coating and Tribology with Plasma and Ion Beam Process
Author:
Publisher
Japan Society for Precision Engineering
Subject
Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/jjspe/83/4/83_319/_pdf
Reference20 articles.
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2. 2) A. Erdemir, O.L. Eryidmaz and G. Fenske : Synthesis of diamond like carbon films with superlow friction and wear properties, J. Vac. Sci. Technol., A18 (4) (2000) 1987-1992.
3. 3) A. Erdemir : The role of hydrogen in tribological properties of diamond-like carbon filmsOriginal Surface Coatings and Technology, 146-147 (2001) 292-297.
4. 5) N. Win Khun, A. Neville, I. Kolev and H. Zhao : Effects of Substrate Bias on Tribological Properties of Diamondlike Carbon Thin Films Deposited Via Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition, Journal of Tribology, 138 (3) (2016) 031301-1-031301-6.
5. 6) M. Tuda and K. Ono : New-type microwave plasma source excited by azimuthally symmetric surface waves with magnetic multicusp fields, Journal of Vacuum Science & Technology a, 16 (5) (1998) 2832-2839.
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