Effects of methane flow rate on the optical properties and chemical bonding of germanium carbon films deposited by reactive sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference32 articles.
1. Fabrication of a‐SiGe structure by rf sputtering for solar cell purposes
2. Si-rich a-SiC:H thin films: Structural and optical transformations during thermal annealing
3. Fabrication of amorphous silicon carbide films using VHF-PECVD for triple-junction thin-film solar cell applications
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