Magnetic field influence on ionization zones in high-power impulse Magnetron Sputtering-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Magnetic field influence on ionization zones in high-power impulse Magnetron Sputtering

Published:2018-10 Issue: Volume:156 Page:9-19
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Raman Priya,Cheng Matthew,Weberski Justin,Xu Wenyu,Houlahan Thomas,Rivera Jose,Su Rui,Shchelkanov Ivan,Ruzic David

Funder

NSF Center for Lasers and Plasmas for Advanced Manufacturing under the I/UCRC program

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference25 articles.

1. High-current low-pressure quasi-stationary discharge in a magnetic field: experimental research;Mozgrin;Plasma Phys. Rep.,1995

2. An introduction to thin film processing using high-power impulse magnetron sputtering;Lundin;J. Mater. Res.,2012

3. Plasma flares in high power impulse magnetron sputtering;Ni;Appl. Phys. Lett.,2012

4. Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons;Panjan;Plasma Sources Sci. Technol.,2014

5. Spokes and charged particle transport in HiPIMS magnetrons;Brenning;J. Phys. Appl. Phys.,2013

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Overall aspect for designing magnetron sputtering plasma sources and their applications in the deposition of ITO films;AIP Advances;2024-05-01

2. Time-resolved ion energy distribution functions during a HiPIMS discharge with cathode voltage reversal;Physica Scripta;2022-12-06

3. Physical vapor deposition technology for coated cutting tools: A review;Ceramics International;2020-08

4. Modeling and plasma characteristics of high-power direct current discharge;Plasma Sources Science and Technology;2020-02-01

5. The statistics of spoke configurations in high-power impulse magnetron sputtering discharges;Journal of Physics D: Applied Physics;2019-01-28

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3