Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons
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Published:2014-03-17
Issue:2
Volume:23
Page:025007
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ISSN:0963-0252
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Panjan Matjaž,
Franz Robert,
Anders AndréORCID
Subject
Condensed Matter Physics
Cited by
52 articles.
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