Investigations of failure mechanisms at Ta and TaO diffusion barriers by secondary neutral mass spectrometry-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Investigations of failure mechanisms at Ta and TaO diffusion barriers by secondary neutral mass spectrometry

Published:2009-08 Issue:1 Volume:84 Page:130-133
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Lakatos A.,Csik A.,Langer G.A.,Erdelyi G.,Katona G.L.,Daroczi L.,Vad K.,Toth J.,Beke D.L.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference20 articles.

1. Investigation of Ta grain boundary diffusion in copper by means of Auger electron spectroscopy

2. Degradation mechanisms of Ta and Ta–Si diffusion barriers during thermal stressing

3. Thermal stability of a Cu/Ta multilayer: an intriguing interfacial reaction

4. The formation of Cu3Si: Marker experiments

5. Formation, oxidation, electronic, and electrical properties of copper silicides

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Tracer Diffusion and Understanding the Atomic Mechanisms of Diffusion;Handbook of Solid State Diffusion, Volume 1;2017

2. Mass spectrometric methods for the direct elemental and isotopic analysis of solid material;Russian Chemical Reviews;2016-04-30

3. Formation of Cu6Sn5 phase by cold homogenization in nanocrystalline Cu–Sn bilayers at room temperature;Microelectronics Reliability;2016-01

4. Anomalous Kinetics and Regimes of Growth of Intermetallic Phases during Solid State Reactions in Nanosystems;Diffusion Foundations;2014-09

5. Hydrogen outgassing induced liner/barrier reliability degradation in through silicon via's;Applied Physics Letters;2014-04-07

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3