Author:
Komarov F.F.,Mironov A.M.,Zayats G.M.,Tsurko V.A.,Velichko O.I.,Komarov A.F.,Belous A.I.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference12 articles.
1. Improved near surface characterization of shallow arsenic distribution by SIMS depth profiling
2. Transient enhanced diffusion of arsenic in silicon
3. Komarov FF, Mironov AM, Tsurko VA, Velichko OI, Zayats GM. In: Proceedings of NEET2005, Zakopane, Poland, June, 21–24, 2005. p. 68–70.
4. Velichko OI, Mironov FM, Tsurko VA, Zayats GM. In: SEQ CHAPTER Proceedings of IRS 2005, Minsk 28–30.09, 2005, 197pp.
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