Effect of pulse parameter change on a-SiCN diaphragms for environmental cells fabricated by magnetic-field- and pulsed-plasma-enhanced chemical vapor deposition-Reference-Cited by-同舟云学术

Effect of pulse parameter change on a-SiCN diaphragms for environmental cells fabricated by magnetic-field- and pulsed-plasma-enhanced chemical vapor deposition

Published:2018-12 Issue: Volume:158 Page:60-64
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Murano Masanori,Matsutani Takaomi,Kawasaki Tadahiro

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference12 articles.

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2. Effect of the deposition conditions on the morphology and bonding structure of SiCN films;Cheng;Mater. Chem. Phys.,2004

3. Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD;Vassallo;Appl. Surf. Sci.,2006

4. Mechanical and optical properties of hard SiCN coatings prepared by PECVD;Klemberg-Sapieha;Thin Solid Films,2004

5. Development of magnetic-field and pulsed-plasma-enhanced chemical vapor deposition method to fabricate amorphous silicon carbonitride diaphragm for environmental-cell transmission electron microscope;Yamasaki;Vacuum,2015

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