Funder
Russian Foundation for Basic Research
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference45 articles.
1. Deposition of metal coatings by magnetron sputtering from liquid target;Danilin;Elektron. Tekhnol.,1978
2. Pulsed magnetron sputtering of metallic films using a hot target;Vlcek,2009
3. High-rate reactive deposition of transparent SiO2 films containing low amount of Zr from molten magnetron target;Musil;Thin Solid Films,2010
4. Deposition of copper coatings in a magnetron with liquid target;Tumarkin;Phys. Atom. Nucl.,2015
5. Magnetron deposition of coatings with evaporation of the target;Bleykher;Tech. Phys.,2015
Cited by
10 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献