The improvement of toughness and tribological properties of niobium nitride film by addition of copper
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference16 articles.
1. Crystallographic structure and surface composition of thin films grown by RF magnetron sputtering
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3. The enhancement of fracture toughness and tribological properties of the titanium nitride films by doping yttrium
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5. A study on the synthesis and formation behavior of nanostructured TiN films by copper doping
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