Crystallographic structure and surface composition of thin films grown by RF magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference6 articles.
1. Sectional structures and electrical properties of ultrathin NbN/MgO bilayers on Si(100)
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3. Reactive magnetron sputter deposition of niobium nitride films
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5. Influence of the substrate bias voltage on the crystallographic structure and surface composition of Ti6A14V thin films deposited by rf magnetron sputtering
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