Synthesis of high-density MgO films by a novel magnetron sputtering system
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference15 articles.
1. Surface discharge characteristics of MgO thin films prepared by RF reactive magnetron sputtering
2. Epitaxial growth of MgO films on Si(111) by metal organic chemical vapor deposition
3. The structural, optical and secondary electron emission properties of MgO and Mg–O–Cs thin films prepared by ion beam assisted deposition
4. MgO deposition using reactive ionized sputtering
5. Surface-discharge characteristics of MgO-thin films prepared by reactive RF unbalanced magnetron sputtering
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3. Preparation of a novel magnesium oxide nanofilm of honeycomb-like structure and investigation of its properties;Chemical Engineering Journal;2016-11
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5. Pulsed bias effect on crystallinity and nano-roughness of Ti6Al4V-N films deposited by grid assisted magnetron sputtering system;Materials Research;2014-12
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