Fabrication of soft x-ray zone plates using carbon, titanium as sacrificial layer
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference21 articles.
1. Soft X-rays and Extreme Ultraviolet Radiation – Principles and Applications;Attwood,1999
2. A compound refractive lens for focusing high-energy X-rays
3. Focusing systems for the generation of X-ray micro beam: An overview
4. Diffraction optics for X-ray imaging
5. Phase zone plates for x rays and the extreme uv
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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2. Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-09
3. Fabrication of high aspect ratio submicron gratings on ∼100nm titanium membranes using electron beam lithography;AIP Conference Proceedings;2017
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