Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching-Reference-Cited by-同舟云学术

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Fabrication of tungsten Fresnel zone plates for hard x-rays using wet etching

Published:2017-09 Issue:5 Volume:35 Page:051602
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Tiwari Pragya,Mondal Puspen,Srivastava A. K.,Srivastava Himanshu,Dhawan Rajnish,Rai Sanjay

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4999933

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optimization of displacement Talbot lithography for fabrication of uniform high aspect ratio gratings;Japanese Journal of Applied Physics;2021-02-22

2. Simulation of an X-ray Fresnel Zone Plate with Nonideal Factors;CURR OPT PHOTONICS;2020

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