Ion Projection Lithography: Progress of European MEDEA & International Program-Reference-Cited by-同舟云学术

Ion Projection Lithography: Progress of European MEDEA & International Program

Published:2000-06 Issue:1-4 Volume:53 Page:37-45
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Kaesmaier Rainer,Löschner Hans

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. Ion projection lithography: Status of the MEDEA project and United States/European cooperation;Gross;J. Vac. Sci. Technol.,1998

2. Ion Projection Lithography: International Development Program;Kaesmaier,1999

3. VDE/VDI Conference;Ehrmann,1999

4. White Paper on Ion Projection Lithography;Löschner,1999

5. Recent Progress in Ion Projection Lithography;Kaesmaier,1998

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