Author:
Weidenmüller U.,Meijer J.,Baving P.,Röcken H.,Bukow H.H.,Rolfs C.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Prospects of ion projection techniques for maskless implantation at high ion energies;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-04
2. Heavy ion projection beam system for material modification at high ion energy;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2002