Author:
Simon K.,Vladimirsky O.,Vladimirsky Y.,Cerrina F.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Handbook of Microlithography, Micromachining, and Microfabrication, Vol. 1
2. Alignment and overlay accuracy of an advanced x-ray stepper using an improved alignment system;Gabeli;SPIE,1992
3. Impact of chuck flatness on wafer distortion and stepper overlay;Stauch;Microelec. Engineering,1994
4. Alignment errors from resist coating topography;Bobroff;J. Vac. Sci. Technol. B,1988
5. L. K. White, “The characterization and simulation of spin-coated resist contours”, SPIE Vol. 539; p.29
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献