Fabrication technology for improving pattern quality in focusing waveguide grating coupler manufacture-Reference-Cited by-同舟云学术

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Fabrication technology for improving pattern quality in focusing waveguide grating coupler manufacture

Published:2003-03 Issue:3 Volume:65 Page:307-318
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Kim Hae-Sung,Kim Tae-Youb,Kim Yark-Yeon,Han Gee-Pyeong,Paek Mun-Cheol,Shin Dong-Hoon,Rhee Jin-Koo

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference30 articles.

1. Nanofabrication of solid- state Fresnel lenses for electron optics

2. Mirrorless Lasing from Mesostructured Waveguides Patterned by Soft Lithography

3. Fabrication of submicrometre parallelogramic-shaped gratings in SiO2

4. Efficient focusing polymer waveguide grating couplers

5. Volume grating preferential-order focusing waveguide coupler

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Erratum to: “Fabrication technology for improving pattern quaility in focusing waveguide grating coupler manufacture”;Microelectronic Engineering;2003-05

2. Diffraction limit of the focusing waveguide grating coupler for optical probe information storage;Nanotechnology;2003-04-25

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