Erratum to: “Fabrication technology for improving pattern quaility in focusing waveguide grating coupler manufacture”
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Published:2003-05
Issue:4
Volume:65
Page:498-499
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ISSN:0167-9317
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Container-title:Microelectronic Engineering
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language:en
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Short-container-title:Microelectronic Engineering
Author:
Kim Hae-Sung,Kim Tae-Youb,Kim Yark-Yeon,Han Gee-Pyeong,Paek Mun-Cheol,Shin Dong-Hoon,Rhee Jin-Koo
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials