Deposition of Cu films from supercritical fluids using Cu(I) β-diketonate precursors-Reference-Cited by-同舟云学术

Deposition of Cu films from supercritical fluids using Cu(I) β-diketonate precursors

Published:2002-10 Issue:1-4 Volume:64 Page:53-61
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Cabañas Albertina,Blackburn Jason M.,Watkins James J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference19 articles.

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4. J.J. Watkins, T.J. McCarthy, Method of chemically depositing material onto a substrate, US Pat. no. 5789027, November 12, 1996

5. Reactive Deposition of Conformal Palladium Films from Supercritical Carbon Dioxide Solution

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