Author:
Hagouel P.I.,Karafyllidis I.,Neureuther A.R.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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4. P. I. Hagouel, I. Karafyllidis, and A. R. Neureuther, “Developer Temperature Effect on Negative Deep UV Resists: Characterization, Modeling and Simulation”, to appear in Journal of Vacuum Science and Technology B.
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