Blazed diffraction gratings fabricated using X-ray lithography: fabrication, modeling and simulation
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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4. Shape Prediction of 3-D Microstructures Fabricated by PCT Technique and Synchrotron Radiation Lithography;IEEJ Transactions on Electrical and Electronic Engineering;2010-03
5. Nanofabrication Simulation as a processes research tool;2008 26th International Conference on Microelectronics;2008-05
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