Optical depth profiling by attenuated total reflection Fourier transform infrared spectroscopy using an incident beam with arbitrary degree of polarization
Author:
Publisher
Elsevier BV
Subject
Spectroscopy
Reference18 articles.
1. S. Ekgasit and H. Ishida, Appl. Spectrosc., in press.
2. Matrix formalism for calculation of electric field intensity of light in stratified multilayered films
3. Quantitative depth profiling with Fourier transform infrared spectroscopy
4. Theoretical Development for Depth Profiling of Stratified Layers Using Variable-Angle ATR
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3. Inverse problem theory in the optical depth profilometry of thin films;Review of Scientific Instruments;2002-12
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