EPR study of He-implanted Si
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference20 articles.
1. Helium desorption/permeation from bubbles in silicon: A novel method of void production
2. Gettering of metals by He induced voids in silicon
3. Gettering of metals by voids in silicon
4. Binding of cobalt and iron to cavities in silicon
5. Secondary defect dissolution by voids in silicon
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