Molibdenum contamination in silicon 1. Molibdenum detection by lifetime techniques-Reference-Cited by-同舟云学术

Molibdenum contamination in silicon 1. Molibdenum detection by lifetime techniques

Published:1998-05 Issue:3 Volume:53 Page:300-309
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Polignano M.L,Bresolin C,Pavia G,Soncini V,Zanderigo F,Queirolo G,Di Dio M

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference23 articles.

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4. Iron detection in the part per quadrillion range in silicon using surface photovoltage and photodissociation of iron‐boron pairs

5. M.L. Polignano, C. Bresolin, F. Cazzaniga, A. Sabbadini and G. Queirolo, Optical Characterization Techniques for High-Performance Microelectronic Device Maufacturing II, in: J.K. Lowell, R.T. Chen, J.P. Mathur (Eds.), Proc. SPIE 2638, 1995, p. 14.

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