Investigation of Si nanocluster formation in sputter-deposited silicon sub-oxides for nanocluster memory structures
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference22 articles.
1. A room-temperature silicon single-electron metal–oxide–semiconductor memory with nanoscale floating-gate and ultranarrow channel
2. A silicon nanocrystals based memory
3. Synthesis and characterization of aerosol silicon nanocrystal nonvolatile floating-gate memory devices
4. Formation and characteristics of silicon nanocrystals in plasma-enhanced chemical-vapor-deposited silicon-rich oxide
5. Silicon nanocrystal formation in thin thermal-oxide films by very-low energy Si+ ion implantation
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