Dense PZT thick films derived from sol-gel based nanocomposite process
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference17 articles.
1. Processing of PZT piezoelectric thick films on silicon for microelectromechancial systems
2. Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors
3. Preparation of Ferroelectric Thick Film Actuator on Silicon Substrate by Screen-Printing
4. Processing and characterization of Pb(Zr, Ti)O3 films, up to 10 μm thick, produced from a diol sol-gel route
5. Characterization of sol-gel Pb(Zr0.53Ti0.47)O3 films in the thickness range 0.25–10 μm
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1. A Review on Piezoelectric Materials and Their Applications;Crystal Research and Technology;2022-11-27
2. Comparison of dielectric properties of sol–gel derived pure and calcium modified lead zirconate titanate ceramics and thick films of compositions near MPB;Materials Today: Proceedings;2022
3. Effects of annealing temperature and pressure of vacuum infiltration on the electrical properties of Pb(Zr0.52Ti0.48)O3 thick films prepared via a modified sol–gel method;Thin Solid Films;2020-07
4. Adjustable response of PZT thin film based piezoelectric micro-actuator through DC bias pre-polarization;Solid-State Electronics;2020-01
5. Study of Pb(Zr 0.52 Ti 0.48 )O 3 microelectromechanical system piezoelectric accelerometers for health monitoring of mechanical motors;Journal of the American Ceramic Society;2019-01-07
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