Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. A novel micropump design with thick-film piezoelectric actuation
2. Thick-film printing of PZT onto silicon
3. Processing of PZT piezoelectric thick films on silicon for microelectromechancial systems
4. Thick film PZT/micromachined silicon accelerometer
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