1. D. Kinkead, M. Joffe, J. Higley, O. Kishkovich, Sematech Report #95052812A-TR, 1995, 29 pp.
2. F. Tardif, G. Quagliotti, T. Baffert, L. Secourgeon, Proc. of UCPSS'96, Antwerp, Belgium, September 23–25, 1996, pp. 309–312.
3. Impact of Organic Contamination on Thin Gate Oxide Quality
4. International Technology Roadmap for Semiconductors, Defect Reduction, Front End Processes, 1999.
5. Per Stoltze, Introduction to heterogeneous catalysis, Concepts and calculations, Department of Physics, Technical University of Denmark, 1999, http://aue.auc.dk/∼stoltze/catal/book/main.htm.