Real-time monitoring and control during MBE growth of GaAs/AlGaAs Bragg reflectors using multi-wavelength ellipsometry-Reference-Cited by-同舟云学术

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Real-time monitoring and control during MBE growth of GaAs/AlGaAs Bragg reflectors using multi-wavelength ellipsometry

Published:1997-02 Issue:1-3 Volume:44 Page:134-138
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Johs Blaine,Herzinger Craig,He Ping,Pittal Shakil,Woollam John,Wagner Thomas

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference12 articles.

1. Variable angle spectroscopic ellipsometry: A non-destructive characterization technique for ultrathin and multilayer materials

2. Automatic rotating element ellipsometers: Calibration, operation, and real‐time applications

3. Optical control of growth of AlxGa1−xAs by organometallic molecular beam epitaxy

4. Variable angle of incidence spectroscopic ellipsometry: Application to GaAs‐AlxGa1−xAs multiple heterostructures

5. Low‐retardance fused‐quartz window for real‐time optical applications in ultrahigh vacuum

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1. Molecular orientation in small-molecule organic light-emitting diodes;Journal of Materials Chemistry;2011

2. In situ real-time spectroscopic ellipsometry measurement for the investigation of molecular orientation in organic amorphous multilayer structures;Journal of Applied Physics;2010-06-15

3. Ion beam sputter deposition of soft x-ray Mo∕Si multilayer mirrors;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2005

4. In situ monitoring of MOVPE growth by combined spectroscopic ellipsometry and reflectance-difference spectroscopy;Thin Solid Films;2000-03

5. Spectroscopic ellipsometry for characterization of InAs/Ga1−xInxSb superlattices;Journal of Applied Physics;1998-05-15

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