1. G.E. McGuire, Semiconductor Materials and Process Technology Handbook, Noyes Publications, Westwood, New Jersey, 1988.
2. W. Kern, Handbook of Semiconductor Wafer Cleaning Technology, Noyes Publications, Westwood, New Jersey, 1993.
3. Waste generation and minimization in semiconductor industry;Giles;J. Environ. Eng., ASCE,1994
4. P.V. Zant, Microchip Fabrication, third ed., McGraw-Hill, New York, 2000.
5. J.M. Steigerwald, S.P. Murarka, R.J. Guttmann, Chemical Mechanical Planarization of Semiconductor Materials, Wiley, New York, 1997.