Waste Generation and Minimization in Semiconductor Industry

Author:

Gilles David G.,Loehr Raymond C.

Publisher

American Society of Civil Engineers (ASCE)

Subject

General Environmental Science,Civil and Structural Engineering,Environmental Chemistry,Environmental Engineering

Reference11 articles.

1. MEMC Etch—A Chromium Trioxide‐Free Etchant for Delineating Dislocations and Slip in Silicon

2. Chestnut A. (1991). “Electronic materials firm sees benefits in waste minimization.” Pollut. Eng. Sep. 117–118.

3. Draft report‐toxic release inventory experience of the California‐based semiconductor industry 1987–1990 . (1992). Semiconductor Industry Association Cupertino Calif.

4. Gee L. (1990). “Reduction of hydrofluoric acid waste in semiconductor operations.” Proc. 36th Annual Tech. Meeting Institute of Environmental Sciences Mount Pleasant Ill. 69–71.

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