Self-assembling GaAs mirror with electrostatic actuation using micro-origami-Reference-Cited by-同舟云学术

Self-assembling GaAs mirror with electrostatic actuation using micro-origami

Published:2004-08 Issue:1-2 Volume:24 Page:78-81
ISSN:1386-9477
Container-title:Physica E: Low-dimensional Systems and Nanostructures
language:en
Short-container-title:Physica E: Low-dimensional Systems and Nanostructures

Author:

Fleischmann T,Kubota K,Vaccaro P.O,Wang T.-S,Saravanan S,Saito N

Publisher

Elsevier BV

Subject

Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. Characterization of AlGaAs microstructure fabricated by AlGaAs/GaAs micromachining

2. Strain-driven self-positioning of micromachined structures

3. Nanoscale engineering using controllable formation of ultra-thin cracks in heterostructures

4. V.Ya. Prinz, V.A. Seleznev, A.K. Gutakovsky, A.V. Chehovskiy, V.V. Preobrazenskii, M.A. Putyato, L.A. Nenasheva, Proceeding of the 26th International Symposium on Compound Semiconductors, Berlin, 22–26 August 1999, p. 199.

5. Self-Assembly of Microstage Using Micro-Origami Technique on GaAs

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