Secondary ion emission enhancement assisted by electron beam in secondary ion mass spectrometry

Author:

Lee Wei-Chiang,Hwang J.

Publisher

Elsevier BV

Subject

Physical and Theoretical Chemistry,Spectroscopy,Condensed Matter Physics,Instrumentation

Reference26 articles.

1. R. Liu, C.M. Ng, A.T.S. Wee, Ultra shallow secondary ion mass spectrometry. Solid-State and Integrated-Circuit Technology, 2001, ieeexplore.ieee.org.

2. Quantitative depth profile and bulk analysis with high dynamic range by electron gas sputtered neutral mass spectrometry;Jede;J. Vac. Sci. Technol. A,1988

3. Surface analysis by SNMS: femtosecond laser postionization of sputtered and laser desorbed atoms;Nicolussi;Surf. Interface Anal.,1996

4. Fundamental aspects of SNMS for thin film characterization: experimental studies and computer simulations;Husinsky;Thin Solid Films,1996

5. Analysis of electrically non-conducting sample structures with electron and mass spectroscopic methods;Oechsner;Thin Solid Films,1999

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