Gas-phase ion chemistry of Si+ and NF3: An experimental and theoretical study
Author:
Publisher
Elsevier BV
Subject
Physical and Theoretical Chemistry,Spectroscopy,Condensed Matter Physics,Instrumentation
Reference38 articles.
1. Advanced Inorganic Fluorides;Ishii,2000
2. Photochemical removal of organic contaminants from silicon surface at room temperature
3. Etching of 6H‐SiC and 4H‐SiC using NF 3 in a Reactive Ion Etching System
4. Modeling Chemical Downstream Etch Systems for NF 3 / O 2 Mixtures
5. Electrical impedance analysis and etch rate maximization in NF3/Ar discharges
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1. Nitrogen Trifluoride Complexes of Group 10 Transition Metals M(NF3) (M = Pd, Pt);Chemical Science;2023
2. Experimental and Theoretical Study on the Gas-Phase Reactions of Germyl Radicals with NF3: Homolytic Substitution at the Nitrogen Atom vs Fluorine Abstraction;ACS Omega;2020-03-03
3. Bimolecular Homolytic Substitutions at Nitrogen: An Experimental and Theoretical Study on the Gas-Phase Reactions of Alkyl Radicals with NF3;Chemistry - A European Journal;2015-09-08
4. High pressure mass-spectrometric investigations of ion–molecule reactions in propane and argon mixtures;Vacuum;2013-04
5. Gas-phase reactions of SiHn+ (n = 1,2) with NF3: A computational investigation on the detailed mechanistic aspects;Journal of Computational Chemistry;2012-05-28
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