A novel method for diameter measurement of silicon single crystal-Reference-Cited by-同舟云学术

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A novel method for diameter measurement of silicon single crystal

Published:2018-06 Issue: Volume:121 Page:286-293
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Wang Xuanyin,Xiang Senwei,Xiang Ke,Pan Feng

Funder

Wafer Works Corporation, Shanghai

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference19 articles.

1. Temperature and flow visualization in a simulation of the Czochralski process using temperature-sensitive liquid crystals;Aleksic;Ann. N. Y. Acad. Sci.,2002

2. Recent progress of crystal growth modeling and growth control;Lan;Chem. Eng. Sci.,2004

3. Automated control of Czochralski and shaped crystal growth processes using weighing techniques;Abrosimovi;Prog. Cryst. Growth Charact. Mater.,2003

4. Modelling the dynamics and control design for Czochralski, liquid encapsulated Czochralski and floating zone processes;Satunkin;Prog. Cryst. Growth Charact. Mater.,2010

5. Crystal weighing mechanism for growth monitoring of czochralski grown crystals;Reinert;J. Cryst. Growth,1974

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1. A Soft Measurement Method for the Tail Diameter in the Growing Process of Czochralski Silicon Single Crystals;Applied Sciences;2024-02-16

2. A novel IoT based machine vision system for on-machine diameter measurement and optimization;Engineering Research Express;2023-12-01

3. Sub-pixel Edge Detection in Diameter Measurement for Single Silicon Crystal;2022 IEEE International Conference on Robotics and Biomimetics (ROBIO);2022-12-05

4. Micro vision-based measurement of concentricity for both the TO base and active area of an APD chip in optical component packaging;Optics Express;2022-10-03

5. Research on Sensitivity of Speckle Center Coordinate Values by Contour and Background Noise and Elimination Method;International Journal of Pattern Recognition and Artificial Intelligence;2019-09-24

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