Feasibility analysis for machining serpentine microchannels on glass using rotary ultrasonic milling

Author:

Jain Apoorv,Singh Gurmeet,Jain Vivek,Gupta Dheeraj

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference41 articles.

1. Three-dimensional lithographical fabrication of microchannels;Yao;J. Micro Electromech. Syst.,2005

2. Powder blasting for three-dimensional micro structuring of glass;Belloy;Sens. Actuators, A,2000

3. Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass;Hwang;Appl. Phys. A,2004

4. Development of a novel two-channel microfluidic system for biomedical applications in cancer research;Rajabi;Biomed. Eng./BiomedizinischeTechnik,2012

5. Fabrication of microfluidic devices in silica glass by water-assisted ablation with femtosecond laser pulses;Li;J. Micromech. Microeng.,2011

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