Young’s modulus measurement of a silicon nitride thin-film using an ultrasonically actuated microcantilever
Author:
Funder
Ministry of Science, ICT & Future Planning
Publisher
Elsevier BV
Subject
Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation
Reference16 articles.
1. The chips are down for Moore’s law;Waldrop;Nature,2016
2. Effect of deposition conditions on thermo-mechanical properties of free standing silicon-rich silicon nitride thin film;Hwangbo;Microelectron. Eng.,2012
3. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments;Oliver;J. Mater. Res.,1992
4. Bulk-wave and guided-wave photoacoustic evaluation of the mechanical properties of aluminum/silicon nitride double-layer thin films;Zhang;Ultrasonics,2006
5. Micro- and nanomechanical sensors for environmental, chemical, and biological detection;Waggoner;Lab Chip,2007
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