Bulk-wave and guided-wave photoacoustic evaluation of the mechanical properties of aluminum/silicon nitride double-layer thin films-Reference-Cited by-同舟云学术

Bulk-wave and guided-wave photoacoustic evaluation of the mechanical properties of aluminum/silicon nitride double-layer thin films

Published:2006-12 Issue:1-4 Volume:45 Page:66-76
ISSN:0041-624X
Container-title:Ultrasonics
language:en
Short-container-title:Ultrasonics

Author:

Zhang Feifei,Krishnaswamy Sridhar,Lilley Carmen M.

Publisher

Elsevier BV

Subject

Acoustics and Ultrasonics

Reference41 articles.

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5. Comparison of tensile and bulge tests for thin-film silicon nitride;Edwards;Exp. Mech.,2004

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