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Two-axis crosstalk analysis of gimbal-less MEMS scanners with consideration of rotational alignment

  • Published:2021-02 Issue: Volume:171 Page:108785
  • ISSN:0263-2241
  • Container-title:Measurement
  • language:en
  • Short-container-title:Measurement

Author:

Kim Kwanghyun,Moon Seunghwan,Kim Jinhwan,Park Yangkyu,Lee Jong-Hyun

Funder

Gwangju Institute of Science and Technology

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference27 articles.

1. Closed-loop control of gimbal-less MEMS mirrors for increased bandwidth in LiDAR applications;Milanović;Laser Radar Technol. Appl. XXII.,2017

2. Dual-axis optical coherence tomography for deep tissue imaging;Zhao;Opt. Lett.,2017

3. Two-axis electrostatic gimbaled mirror scanner with self-aligned tilted stationary combs;Moon;IEEE Photonics Technol. Lett.,2016

4. A gimbal-less two-axis electrostatic scanner with tilted stationary vertical combs and serially connected springs via a microassembly process;Jun;J. Micromech. Microeng.,2014

5. Torsional MEMS scanner design for high-resolution scanning display systems;Urey;Opt. Scanning,2002

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